The equipment in the clean room of the research building Laboratory of Nano and Quantum Engineering has been extended by another top product. It is a microscope for fast and nondestructive determination of micro-and nano-geometries on surfaces and generates 3D images with high detail and depth of field. The new microscope (DCM 3D from Leica) combines three microscopes in one instrument: digital microscope, high-resolution confocal measurement system and interferometric profilometer. In confocal mode lateral resolutions in the sub-micrometer range and height resolution in the nanometer range can be achieved. The interferometric mode even allows measurements with a height resolution in the sub-nanometer range.
The new surface measurement device has been funded with initial setup of the new building and is available to employees from the working groups of the LNQE now.
