The research equipment in the Laboratory of Nano and Quantum Engineering (LNQE) have been extended by another analyzer: A new wafer probe station (Cascade Summit type 11000). The probe station is suitable for electrical characterization of samples to 8-Zoll/200 mm. The sample chamber is very well shielded from external electrical effects and the capacitive coupling is extremely small. Temperatures can be varied from -65 ° C to +200 ° C. The wiring allows both DC and RF measurements. The system has a digital camera system with multiple CCD units for different magnifications in real time. The probe station in the LNQE is equipped with an Impedance Analyzer and is on an anti-vibration basis on vibration isolated base in the clean room.
The new probe station was financed with funds from the initial setup LNQE construction project and is available for all scientists from the working groups of the LNQE.
New probe station in LNQE research building.
