It is a thin film deposition system ATS 500 from the company HHV. It can be used to deposit thin metal films such as gold, titanium, silver, copper by cathode sputtering.
The new coating facility will be used for the fabrication of quantum chips for ion trap-based quantum computers. It is funded and procured by the German Federal Ministry of Education and Research (BMBF) in the collaborative project MIQRO ("Scalable Quantum Computer with High Frequency Controlled Stored Ions"). It comes through the research groups of Prof. Dr. Christian Ospelkaus, Prof. Dr. Tanja Mehlstäubler (both Institute of Quantum Optics & Physikalisch-Technische Bundesanstalt), and Prof. Dr. Boris Chichkov (Institute of Quantum Optics). The equipment description and contact person for the facility are listed on the LNQE website under Technology in the LNQE Research Building.
Related links:
